EN

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Zhenyuan Lin Minghui Hong

Zhenyuan Lin, Minghui Hong. 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. 超快科学, 2021(3). doi: 10.34133/2021/9783514
引用本文: Zhenyuan Lin, Minghui Hong. 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. 超快科学, 2021(3). doi: 10.34133/2021/9783514
Zhenyuan Lin,Minghui Hong, . 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. Ultrafast Science, 2021(3). doi: 10.34133/2021/9783514
Citation: Zhenyuan Lin,Minghui Hong, . 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. Ultrafast Science, 2021(3). doi: 10.34133/2021/9783514

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

doi: 10.34133/2021/9783514
基金项目: 

Academic Research Fund Tier 2, Ministry of Education - Singapore (MOE2019-T2-2-147).

详细信息
    通讯作者:

    Correspondence should be addressed to Minghui Hong

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Funds: 

Academic Research Fund Tier 2, Ministry of Education - Singapore (MOE2019-T2-2-147).

  • 摘要: As a noncontact strategy with flexible tools and high efficiency, laser precision engineering is a significant advanced processing way for high-quality micro-/nanostructure fabrication, especially to achieve novel functional photoelectric structures and devices. For the microscale creation, several femtosecond laser fabrication methods, including multiphoton absorption, laser-induced plasma-assisted ablation, and incubation effect have been developed. Meanwhile, the femtosecond laser can be combined with microlens arrays and interference lithography techniques to achieve the structures in submicron scales. Down to nanoscale feature sizes, advanced processing strategies, such as near-field scanning optical microscope, atomic force microscope, and microsphere, are applied in femtosecond laser processing and the minimum nanostructure creation has been pushed down to ~25 nm due to near-field effect. The most fascinating femtosecond laser precision engineering is the possibility of large-area, high-throughput, and far-field nanofabrication. In combination with special strategies, including dual femtosecond laser beam irradiation, ~15 nm nanostructuring can be achieved directly on silicon surfaces in far field and in ambient air. The challenges and perspectives in the femtosecond laser precision engineering are also discussed.
  • 加载中
计量
  • 文章访问数:  130
  • HTML全文浏览量:  0
  • PDF下载量:  0
  • 被引次数: 0
出版历程
  • 收稿日期:  2021-10-17
  • 修回日期:  2021-11-10
  • 刊出日期:  2021-12-01

目录

    /

    返回文章
    返回